Atomic Layer Deposition

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ALD技术制备的薄膜可以提高刀锋的锐度和降低摩擦系数。很好的一致性与保型性可以改善边缘强度和耐久性,并且可以沉积大面积的刀片。典型的耐磨涂层有 ZrO2, TiN还有其他的一些材料。而一些磨具同样可以采用ALD技术沉积一些纳米厚度的薄膜,达到耐磨等效果。还有固体润滑剂等领域,可以采用在固体表面沉积 WS2,Al2O3等薄膜达到润滑的效果。在反刻蚀涂层领域,可以沉积一些极薄的钝化膜,达到掩膜的作用。

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