Atomic Layer Deposition

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3-dimensional conformality is a unique advantage in atomic layer deposition. Therefore, this technology has been vital for coating extremely high aspect ratio micro and nano structure. Besides afore mentioned applications, this technology has also been used in:

  1. internal coating in micropore structures

  2. external and internal coating on nanotubes and nanowires

  3. surface passivation of hollow structures

  4. "nano glue"

  5. passivation layer on biomedical parts and devices

  6. encapsulation of nano particles

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